Comparative Studies on Thin Film of Zinc Oxide (ZnO) Deposited by Spray Pyrolysis and RF Sputtering Technique

Abstract

Thin films of ZnO were deposited on corning glass (by rf sputtering and spray pyrolysis) and annealed at 573 and 673 K respectively. It has been noted that the samples deposited by Spray pyrolysis have an average transmittance, refractive index and extinction coefficient as 80% to 90%, 1.33 to 1.44 and 13.11 to 27.52 respectively. While those deposited by sputtering method have 34% to 80%, 1.51to 1.58 and 0.11 to 0.37. The XRD patterns of the samples shows that they are polycrystalline. Other optical parameters analyzed include the refractive index (n), absorption coefficient ( ) and the extinction coefficient (k).