Optical Characterization of Fluorine Doped Tin Oxide Deposited By Spray Pyrolysis Technique and Annealed In Open Air

Abstract

Fluorine doped tin oxide thin (FTO) films prepared by spray pyrolysis technique at a substrate temperature of 573K. The films deposited were 100 nm thick. After the deposition, the films were then annealed at different annealing temperatures of 423K, 573K and723K respectively in open air. The optical parameters of the prepared films as transmittance, optical energy gap, refractive index, extinction coefficient, porosity, packing density and the dielectric constants were found to be influenced by varying the annealing temperatures.